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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 29507-2013

Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning

Issued Date:

Implemented Date:

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 29507-2013
Standard Category	China National Standards
GB Standard English Title	Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning
GB Standard Chinese Title	硅片平整度、厚度及总厚度变化测试自动非接触扫描法
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